Optical PVD Vacuum Coating Machine Products > Optical PVD Vacuum Coating Machine

Optical PVD Vacuum Coating Machine

optical vacuum coating & metalizing machine/metallizer, as a kind of vacuum metallizer equipment specially designed to coating precision optical film components. its product mainly applied for spotlight, sunglasses, eyeware, helmet, reflective glass, metal, mobile shell, camero, screen, lens ,telescope, watch etc. as long as it need spotlighted. this kind machine is most suitable for it.
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Description

optical vacuum metalizing & coating machine, the most high technical and complicate product,mainly for optical products by optical film, The optically film production process can be satisfied well by use of every systematic units and overall structure.

Application

optical vacuum coating machine is applied in high accuracy of optical components, optical communication products and optical film coating system, such as electrical film, metal film, laser film, cold film, beam splitting film, anti-reflection film, band-pass film, anti-reflection film, cut-off film on the various filters, glass slide and plastic components, etc.

Features

1. High accuracy of film thickness control system
2. Excellent performance electronic gun
3. High degree of automatic coating film control system.

Parameters

Model ZZS-1100 ZZS-1300 ZZS-1500 ZZS-1800
Vacuum chamber Φ1100 × 1300 mm, 304 Stainless steel Φ1300 × 1500 mm, 304 Stainless steel Φ1500 × 1600 mm, 304 Stainless steel Φ1800 × 1800 mm, 304 Stainless steel
Workpiece Plate Φ1030 mm Φ1200 mm Φ1400 mm Φ1700 mm
Vacuum System Mechanical pump 1pcs + Diffusion pump 2pcs + Maintaining pump 1pcs + Roots pump 1pcs + Freon cold trap 1pcs Mechanical pump 2pcs + Diffusion pump 2pcs + Maintaining pump 1pcs + Roots pump 1pcs + Polycold (Double end) Mechanical pump 2pcs + Diffusion pump 2pcs + Maintaining pump 1pcs + Roots pump 1pcs + Polycold (Double end) Mechanical pump 2pcs + Diffusion pump 2pcs + Maintaining pump 1pcs + Roots pump 1pcs + Polycold (Double end)
Baking Temperature Tubular heater enclosure layout, the maximum temperature 350℃
Evaporation Source 2pcs electron gun, 6 kW, Type E 270℃, single power supply 2pcs electron gun, 6 kW, Type E 270℃, single power supply 2pcs electron gun, 8 kW, Type E 270℃, single power supply 2pcs electron gun, 8 to 10 kW, Type E 270℃, single power supply
Optical Film Thickness Control 1pcs optical special power, 1pcs optical film thickness control device, 1pcs grating monochromator, the range of wave length 380 to 1100nm, transmission/reflection
Quartz Crystal Control SQC310, XTC-3 or IC/6
Ion Source Kaufman or Hall source
Electrical Automatic Control The equipment adopts color touch screen system + PLC control, it has good machine interface and control function. It is matched with crystal control to realize process automation.
Ultimate Vacuum Below 3 ×10-4Pa Below 3 ×10-4Pa Below 3 ×10-4Pa Below 3 ×10-4Pa
Recovery Vacuum Atms. to 4 ×10-3 Pa ≤15 min Atms. to 4 ×10-3 Pa ≤15 min Atms. to 4 ×10-3 Pa ≤15 min Atms .to 4 ×10-3 Pa ≤15 min
Way of Control Manual + Automatic Manual + Automatic Manual + Automatic Manual + Automatic
Working Conditions
Dimension of the Equipment About 3000 mm(L) × 1350 mm(W) × 2900 mm(H) About 3500mm(L) × 1500mm(W) × 3100mm(H) About 4500mm(L) × 2000mm(W) × 3000mm(H) About 6000mm(L) × 2800mm(W) × 3200mm(H)
Power Supply 3 phase, 380V; 50Hz,about 60kW 3 phase, 380V; 50Hz,about 70kW 3 phase, 380V; 50Hz,about 80kW 3 phase, 380V; 50Hz,about 95kW
Circulating Water Pressure 0.15 to 0.3MPa 0.15 to 0.4MPa 0.15 to 0.4MPa 0.15 to 0.45MPa
Compressed Air Pressure Above 0.5MPa Above 0.5MPa Above 0.5MPa Above 0.5MPa
Weight (kg) About 4000 kg About 5000 kg About 6500 kg About 7500 kg